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Development of Piezoelectric Device for Medical Micro Machine
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| Kaduichi KITAGAWA, Takeshi TOYODA, Akira MATSUDA, Kazuo YAMANA,
and Katsuaki SAKAYA |
Recently, piezoelectric ceramics have been given attention to utilization
in medical micromachine. When piezoelectric actuators are utilized for
driver of micromachine, they are driven under high frequcy and their sizes
and thickness become small and thin. Under such conditions, heat generation
has been observed. Heat generation influences the piezoelectric properties
and reliability and fracture.
In this study, degradation of piezoelectric ceramics after applying a
large input pulse voltage is investigated. Large input power caused the
heat generation, and the heat generation was the phenomenon under the
resonant mode. All electro-mechanical coupling factor(k31) were almost
constant. However, mechanical quality factor(Qm) values decreased.
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Keywords ■■■ |
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medical micromachine, piezoelectric
actuator, heat generation, mechanical quality factor, fracture |
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